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Titanium Round Target

Suitable for sputtering coating, widely used in semiconductor chips, MEMS sensors, photoelectric devices, wide forbidden band semiconductor, graphene and other industry fields.

Product Details

Titanium round target

China Grade:TA1,TA2,TA3,TA9,TA10,TC4,TC11.

America Grade:TA1,TA2,TA3,TA9,TA10,TC4,TC11.

China Standard:GB/T 16598,GB/T2965.

America Standard:ASTM F2113ASTM F1512.

Processing technology: forging, rolling.

Surface: vehicle light, chamfer, clean and smooth surface, no peeling, pores, cracks and other defects.

Specification: φ100×40,φ98×40,φ95×45,φ90×40,φ85×35,φ65×40.

Chemical composition:

Grade

N

C

H

Fe

O

Al

V

Pb

Mo

Ni

Ti

TA1/Gr1

0.03

0.08

0.015

0.2

0.18

/

/

/

/

/

Balance

TA2/Gr2

0.03

0.08

0.015

0.3

0.25

/

/

/

/

/

Balance

TA3/Gr3

0.05

0.08

0.015

0.3

0.35

/

/

/

/

/

Balance

TA4/Gr4

0.05

0.08

0.015

0.50

0.40

/

/

/

/

/

Balance

TC4/Gr5

0.05

0.08

0.015

0.4

0.2

5.5-6.75

3.5-4.5

/

/

/

Balance

TA9/Gr7

0.03

0.08

0.015

0.3

0.25

/

/

0.12-0.25

/

/

Balance

TA18/Gr9

0.03

0.08

0.015

0.25

0.15

2.5-3.5

2.0-3.0

/

/

/

Balance

Main applications: suitable for sputtering coating, widely used in semiconductor chips, MEMS sensors, photoelectric devices, wide forbidden band semiconductor, graphene and other industry fields.


CONTAGT US

SHENYANG RUITE TITANIUM & NICKEL TECHNOLOGY CO.,Ltd.
Tel: +86 13709850972 / 024-25558500
Website:http://www.cref.org.cn Email:sales@rttini.com
Address: №127 Dapan Middle Road, Economic and Technological Development Zone, Shenyang City, Liaoning Province
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